Fluorescent Dye Based Optical Position Sensing for Planar Linear Motors

نویسندگان

  • Gregory A. Fries
  • Alfred A. Rizzi
  • Ralph L. Hollis
چکیده

Industrial Sawyer motor technology has existed for nearly three decades, traditionally being operated as open-loop positioners. Such systems can attain micron level motion resolution and open-loop repeatability of 10 m. This paper outlines a optical sensing technique for Sawyer motors which is capable of sub-micron resolution. Such a sensor can easily be integrated into a motor enabling closed-loop control and sub-micron repeatability.

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تاریخ انتشار 1999